窦广彬职务:博导
单位:MEMS教育部重点实验室 电话: 出生年月:1975-02-01 邮箱:gdou@seu.edu.cn 学历:博士 地址: 职称:教授
  • 基本信息
  • 教学授课
  • 科学研究
  • 荣誉奖励
  • 团队及招生情况
个人简介
窦广彬教授,教育部“长江学者”,江苏省“双创人才”,南京市“紫金山英才高峰计划”领军人才,现任bevictor伟德官网首席教授、MEMS集成电路学科带头人,南京晶芯光电研究院经理,长期致力于创新半导体工艺和MEMS传感技术研究,多项成果获国际知名企业应用。在MEMS领域,窦教授参与研制的超高灵敏度加速度传感器成功应用于火星探测任务,首次实现火星内核运动的实时监测,推动MEMS技术在深空探测中的重大应用。近期开发的超小型MEMS音叉晶振芯片性能国际领先,展现了突出的学术创新与产业化能力。其研究工作为我国集成电路自主创新与产业升级作出了重要贡献。
教育经历

2003.12-2007.06,英国拉夫堡大学,博士;

1999.09-2001.07,哈尔滨工业大学,硕士;

1995.09-1999.07,哈尔滨工业大学,本科。

工作经历

2019.10-至今, bevictor伟德官网,教授,博导;

2018.05-2019.08,英国伦敦帝国理工学院,研究员;

2008.02-2018.04,英国伦敦帝国理工学院,副研究员;

2007.07-2008.01,英国拉夫堡大学,副研究员;

2002.03-2003.03,香港城市大学,助理研究员。

讲授课程

微电子机械系统概论,48学时,本科

MEMS基础及应用(全英文、研讨),32学时,本科

工程图学,32学时,本科

新生研讨课,吴健雄学院,本科

电子封装可靠性及优化 (全英文),32学时,研究生


教学研究
出版物
研究领域或方向

创新半导体工艺:

1、 传感器结构工艺;

2、 特种封装技术;

3、 封装与系统集成;

MEMS传感技术:

1、硅基传感芯片;

2、石英基传感芯片;

3、极端环境可靠性。


研究项目

主持重大科研项目

1、国家级课题, 高深宽比硅通孔TSV工艺,2024.01-2026.12220万元,在研,主持

2、南京市紫金山高峰人才项目, 基于MEMS技术的5G用石英芯片研发与产业化,2024.01-2026.12500万元,在研,主持(1/1

3、江苏省住建厅,智能化窨井盖建设标准, 2021.08-2023.0723万元,结题,主持

4、东大-中电58所联合研发中心,2021.05-2026.04500万元,在研,主持

5、华为公司,8506006126QMEMS项目,2022.01- 2023.07104万元,结题,主持

6、英国工程与自然科学研究委员会(EPSRC)基金项目,Quasi-ambient bonding to enable cost-effective high temperature Pb-free solder interconnects2018.04-2021.1027万英镑,结题,主持

7、英国工程与自然科学研究委员会(EPSRC)基金项目,System Integration for Plastic Electronics Manufacturing2016.11-2018.0210.8万英镑,结题,主持

8、英国工程与自然科学研究委员会(EPSRC)基金项目,Interconnection Technologies for Integration of Active Devices with Printed Plastic Electronics2017.11-2019.0415.5万英镑,结题,主持

代表性论文:

1)近5年内发表的5篇论著(均为通讯作者)

1Yide Dong, Chunyan Yin, Guangbin Dou* and Litao Sun*. One-step quartz-MEMS micro-fabrication strategy for grooved tuning[J]. Nanotechnology and Precision Engineering[J], 2025, Vol.8(2), doi: 10.1063/10.0036171.

2Yide Dong, Guangbin Dou*, Zibiao Wei, Shanshan Ji, Huihui Dai, Kaiqin Tang and Litao Sun*. Size-Effect-Based Dimension Compensations in Wet Etching for Micromachined Quartz Crystal Microstructures[J]. Micromachines, 2024, Vol.15(6), p.784.

3Haizhou Huang, Jiaxin Shen, Shu Wan, Longxiang Han, Guangbin Dou* and Litao Sun*. Wet-adhesive multifunctional hydrogel with anti-swelling and a skin-seamless interface for underwater electrophysiological monitoring and communication[J], ACS Applied Materials & Interfaces, 2023, Vol.5(9), pp. 11549-11562.

4Haizhou Huang, Yide Dong, Shu Wan, Jiaxin Shen, Chen Li, Longxiang Han, Guangbin Dou* and Litao Sun*. A transient dual-type sensor based on MXene/cellulose nanofibers composite for intelligent sedentary and sitting postures monitoring[J], Carbon, 2022, Vol.200, pp. 327-336.

5Nan Wu, Shu Wan, Shi Su, Haizhou Huang, Guangbin Dou* and Litao Sun*. Electrode materials for brainmachine interface: A review[J], 2021, InfoMat, Vol.3(11), pp.1174-1194.

2)近5年内发表的其他论著(均为通讯作者)

1Songxiang Ji, Chunyan Yin, Guangbin Dou* and Litao Sun*. Design and fabrication of an accelerometer structure using glass fiber reinforced epoxy resin for seismic P-wave early warning[J]. Measurement, 2025, Vol.242, p.115842.

2Jingli Liu, Chunyan Yin*, Chenhui Xia, Xuefei Ming and Guangbin Dou*. Precise Morphology Tailoring of Through Glass Vias Perforated by Selective Laser-Induced Etching on Fused Silica[J]. JOM, 2025, Vol.77(4), pp.18071814.

3Yide Dong, Yike Zhou, Haizhou Huang, Bosong Zhang, Xihan Li, Kaiwen Chen, Litao Sun* and Guangbin Dou*. Etching of quartz crystals in liquid phase environment: A review[J]. Nanotechnology and Precision Engineering, 2024, Vol.7(2), p.025001.

4Jingli Liu, Chenhui Xia, Xuefei Ming, Guangbin Dou* and Chunyan Yin*. Ultrahigh Aspect Ratio Through Glass Vias Perforation Utilizing Selective Laser-Induced Etching with Nanochannels[J]. Advanced Engineering Materials, 2024,  Vol.26(13), p.2400397.

5 孙卓孙立涛窦广彬*. 石英单晶微机械陀螺仪研究进展[J]. 微纳电子技术, 2024, Vol.61(11), pp.17-30.

6Yutong Zhang, Guangbin Dou*, Chunyan Yin, Xinran Zhao and Gang Wang. Experimental and Modeling Analysis on Mechanical Performance of Wafer-Level Micro-Sized SnAg Solder Bump[C]. 25th International Conference on Electronic Packaging Technology (ICEPT 2024). 2024, Tianjin, China, DOI: 10.1109/ICEPT63120.2024.10668718

7Jiang Li, Guangbin Dou*, Chunyan Yin, Ke Zhang and Gang Wang. Optimization of Thermocompression Bonding Process for Fine-Pitch Flip-Chip Applications[C]. 25th International Conference on Electronic Packaging Technology (ICEPT 2024). 2024, Tianjin, China, DOI: 10.1109/ICEPT63120.2024.10668417

8Yide Dong, Zibiao Wei, Chunyan Yin, Litao Sun and Guangbin Dou*. Size-effect on the undercut and dimension compensations in wet etching for micromachined quartz crystal microstructures[C]. 25th International Conference on Electronic Packaging Technology (ICEPT 2024). 2024, Tianjin, China, DOI: 10.1109/ICEPT63120.2024.10668711(最佳论文奖)

9Meng Nie, Pengfan Chen, Lei Wen, Jinwen Fan, Qian Zhang, Kuibo Yin and Guangbin Dou*. Wearable Recognition System for Complex Motions Based on Hybrid Deep-Learning-Enhanced Strain Sensors[J]. Advanced Intelligent Systems, 2023, Vol.5(11), p.2300222.

10Yue Zhan, Kuibo Yin, Meng Nie and Guangbin Dou*. Selective Laser-induced Etching of Borosilicate Glass in Hydrofluoric Acid[C]. 24th International Conference on Electronic Packaging Technology (ICEPT 2023), 2023, Shihezi City, China DOI:10.1109/ICEPT59018.2023.10492430

11Qifan Wu, Chunyan Yin, Xuefei Ming, Zheng Ke, Jiachang Zhu and Guangbin Dou*. Interconnection Performance of Copper Core Solder Joints in Ball-Grid-Array Package[C]. 24th International Conference on Electronic Packaging Technology (ICEPT 2023), 2023, Shihezi City, China, DOI: 10.1109/ICEPT59018.2023.10491899 

12Guangbin Dou*, Yike Zhou and Yide Dong. Effect of isopropyl alcohol acetic acid and sodium dodecyl sulfate on the etching rate and surface roughness of Z-cut quartz etched by BOE solution[C]. 24th International Conference on Electronic Packaging Technology (ICEPT 2023), 2023, Shihezi City, China, DOI: 10.1109/ICEPT59018.2023.10492422

13Meng Nie*, Lei Wen, Shuning Chen, Lu Ai, Jingcheng Shen, Yu-na Zhao, Kuibo Yin and Guangbin Dou*. Strain Sensor with Enhanced Sensitivity for Wearable Electronics Using an Over-balanced Planar Elastomer[J]. Macromolecular Materials and Engineering, 2022, Vol.307(2), p.2100576.

14Haizhou Huang, Nan Wu, Hui Liu, Yide Dong, Longxiang Han, Shu Wan, Guangbin Dou* and Litao Sun*. Directional Sweat Transport and Breathable Sandwiched Electrodes for Electrocardiogram Monitoring System[J]. Advanced Materials Interfaces, 2022, Vol.9(4), p.2101602.

35年以外的代表性论著5篇(均为通讯作者)

1Guangbin Dou*, Andrew S.Holmes. System Integration for Plastic Electronics Using RoomTemperature Ultrasonic Welding[J]. Advanced Engineering Materials, 2020, Vol.22(5), p.1901309.

2、Bin Li, Chunqing Wang*, Guangbin Dou*, Zhenbin Wang and Weidong Fei. Crystallized Bi0.9La0.1Fe0.95Mn0.05O3/Ba0.7Sr0.3Ti0.95Co0.05O3 bilayer thin films with enhanced multiferroic properties[J]. Applied Surface Science, 2017, Vol.404, pp. 162-167.

3Wei Liu, Chunqing Wang*, Guangbin Dou*, Yanhong Tian and Lei Yang. Laser-induced actuation of individual microsize liquid metal droplets on an open solid surface[J]. Applied Physics Express, 2016, Vol.10(1), p. 017202. 

4Guangbin Dou* and Andrew S. Holmes, Eric M. Yeatman, Robert V. Wright, Paul B. Kirby and Chunyan Yin. Transfer of Functional Ceramic Thin Films Using a Thermal Release Process[J]. Advanced Materials, 2011, Vol.23(10), pp.1252-1256.

5、Guangbin Dou*, David Whalley and Changqing liu. Mechanical Characterization of Individual Ni/Au Coated Microsize Polymer Particles[J]. Applied Physics Letters, 2008, 92(10), p.104108.


研究成果

面向国家重大需求,聚焦惯性制导、压力感知与器件制造等科学技术问题,在MEMS传感、系统集成及关键共性器件工艺等核心技术领域取得重大突破。研究成果成功应用于行星探测等重大工程,有力推动了相关产业的技术升级与跨越式发展。

学术兼职

1、国家级特聘教授(国家级)

2、江苏省双创人才,江苏省(省级)

3紫金山计划英才高峰项目人才,南京市(市级)

4、bevictor伟德官网首席教授(正高二级)


团队介绍



招生情况

博士生每年2-3名;

硕士生每年4-5名;

招生信息,请发邮件:gdou@seu.edu.cn


毕业生介绍